On-chip fluorescence sensing for fluidics platforms using thin film silicon photodetectors

The integration of fluorescence sensing directly into the fluidic channel in lab-on-a chip systems using thin film Si detectors enables on-chip multi-target medical diagnostics and biochemical analyses. This paper reports on the experimental demonstration and theoretical analysis of a filter-free thin film fluorescence sensor designed for integration into the channel of a fluidic platform. Static tests of this optical sensor show repeatable detection of 6-Hex fluorophore concentrations from 300 nM to 20 µM, with an average signal-to-noise ratio of 26 dB-50 dB, which agrees well with the theoretical model.